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Wafer thinning air flotation turntable
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The axial radial runout accuracy of the turntable is ≤ 0.5um, the dynamic balance accuracy level is ≤ G0.4, the vibration V within the dynamic rated speed range is ≤ 0.1mm/s, the noise is ≤ 60 dB within the full speed range, the maximum temperature rise of the spindle housing is ≤ 10 ℃, the radial and axial high rigidity and large bearing capacity